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Microelectromechanical Systems by Committee on Advanced Materials

Microelectromechanical Systems: Advanced Materials and Fabrication Methods by Committee on Advanced Materials
National Academies Press | December 8, 1997 | English | ISBN: 0309059801 | 75 pages | PDF | 6 MB

Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to tolerances of 100-billionths of a meter.

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Tags: Microelectromec, Systems, Committee, Advanced, Materials

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