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RF MEMS and Their Applications

RF MEMS and Their Applications by Vijay K. Varadan
English | 25 Oct. 2002 | ISBN: 047084308X | 406 Pages | PDF | 5 MB

Microelectromechanical systems (MEMS) refer to a collection of micro-sensors and actuators, which can react to environmental change under micro- circuit control. The integration of MEMS into traditional Radio Frequency (RF) circuits has resulted in systems with superior performance levels and lower manufacturing costs.


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